Review of Thin Film Temperature and Strain Sensor Technologies for Spacecraft

With the increasing maturity of thin film preparation methods and micro-machining technologies, thin film sensor technologies based on various thin film sensitive elements are experiencing significant development. The advantages of small size, high integration, and high sensitivity of thin film sensors make them show excellent prospects for aerospace applications such as deep space exploration, spacecraft structural health monitoring, manned spaceflight, etc. In this paper, thin film temperature sensing and strain sensing technologies were discussed. According to different sensing applications in spacecraft, the key technologies and research status of thin film sensing materials and devices in cryogenic/high temperature measurement, heat flux sensing, strain sensing at high temperature, and flexible large strain sensing, flexible intelligent skin are reviewed. Finally, the developing trends of thin film sensors are prospected.