Design of Micro Capacitance Measurement System for MEMS Capacitance Diaphragm Gauges

In order to satisfy the application requirements of high accuracy, small size, light weight and low power consumption for vacuum measurement instruments in space detection tasks, miniature capacitance diaphragm gauge （CDG） based on MEMS technology comes into being. For the MEMS CDG developed by our team, a micro capacitance measurement system based on CDC capacitor digitizer was designed and fabricated, and it can distinguish capacitance variations of fF-level. The temperature drift error self-calibration technology was adopted to solve the temperature disturbance problem. The testing and verification results of the prototype show that it has the advantages of wide range, high resolution and low power consumption, providing foundation for the application of MEMS CDGs in space detection.