ZHANG Y M，YAN G，ZHANG Z H，et al. Ultra-high pumping speed cryopump based on GM refrigerator developed successfullyJ. Vacuum and Cryogenics，2026，32（2）：220−221. DOI: 10.12446/j.issn.1006-7086.2026.02.014
Citation:
ZHANG Y M，YAN G，ZHANG Z H，et al. Ultra-high pumping speed cryopump based on GM refrigerator developed successfullyJ. Vacuum and Cryogenics，2026，32（2）：220−221. DOI: 10.12446/j.issn.1006-7086.2026.02.014
ZHANG Y M，YAN G，ZHANG Z H，et al. Ultra-high pumping speed cryopump based on GM refrigerator developed successfullyJ. Vacuum and Cryogenics，2026，32（2）：220−221. DOI: 10.12446/j.issn.1006-7086.2026.02.014
Citation:
ZHANG Y M，YAN G，ZHANG Z H，et al. Ultra-high pumping speed cryopump based on GM refrigerator developed successfullyJ. Vacuum and Cryogenics，2026，32（2）：220−221. DOI: 10.12446/j.issn.1006-7086.2026.02.014
Ultra-high Pumping Speed Cryopump Based on GM Refrigerator Developed Successfully
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