YAO Dong, XIONG Yu-qing, WANG Ji-zhou. PROGRESS ON FABRICATION OF THREE-DIMENSIONAL PHOTONIC CRYSTALS BY HOLOGRAPHIC LITHOGRAPHY[J]. VACUUM AND CRYOGENICS, 2010, 16(3): 142-147. DOI: 10.3969/j.issn.1006-7086.2010.03.004
Citation: YAO Dong, XIONG Yu-qing, WANG Ji-zhou. PROGRESS ON FABRICATION OF THREE-DIMENSIONAL PHOTONIC CRYSTALS BY HOLOGRAPHIC LITHOGRAPHY[J]. VACUUM AND CRYOGENICS, 2010, 16(3): 142-147. DOI: 10.3969/j.issn.1006-7086.2010.03.004

PROGRESS ON FABRICATION OF THREE-DIMENSIONAL PHOTONIC CRYSTALS BY HOLOGRAPHIC LITHOGRAPHY

  • Three-dimensional photonic crystals,known as band gap materials,have broad potential applications in the area of optical devices,biochemical sensors,information transmission and storage,etc.Holographic lithography can produce photonic crystals with a strict uniformity and defect-free structure by using a simple setup through low cost process.Theoretical and experimental research progress in fabrication of three-dimensional photonic crystals by holographic lithography method was viewed.Representative examples of every method are given,and their advantages and shortcomings are evaluated.
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