PERFORMANCE STUDY OF A MINIATURE QUADRUPOLE MASS SPECTROMETER IN ULTRA-HIGH VACUUM

Influence of various ion source parameters,such as emission current,focus voltage,and field axis voltage,on the sensitivity,linearity and cracking patterns of the miniature quadrupole mass spectrometer（QMS）,model QMS200,was experimentally studied in ultra-high vacuum.The results show that different parameters results in different influence.The conclusion has some reference on QMS application.