SEVERAL HOT CATHODE IONIZATION VACUUM GAUGE CALIBRATION AND ANALYSIS OF ELECTRICAL PARAMETERS

LIU Bo; DING Lili; LIU Qing; CAO Hui

doi:10.3969/j.issn.1006-7086.2012.02.007

LIU Bo, DING Lili, LIU Qing, et al. SEVERAL HOT CATHODE IONIZATION VACUUM GAUGE CALIBRATION AND ANALYSIS OF ELECTRICAL PARAMETERS[J]. VACUUM AND CRYOGENICS, 2012, 18(2): 101-106. DOI: 10.3969/j.issn.1006-7086.2012.02.007

Citation:

LIU Bo, DING Lili, LIU Qing, et al. SEVERAL HOT CATHODE IONIZATION VACUUM GAUGE CALIBRATION AND ANALYSIS OF ELECTRICAL PARAMETERS[J]. VACUUM AND CRYOGENICS, 2012, 18(2): 101-106. DOI: 10.3969/j.issn.1006-7086.2012.02.007

Citation:

LIU Bo, DING Lili, LIU Qing, et al. SEVERAL HOT CATHODE IONIZATION VACUUM GAUGE CALIBRATION AND ANALYSIS OF ELECTRICAL PARAMETERS[J]. VACUUM AND CRYOGENICS, 2012, 18(2): 101-106. DOI: 10.3969/j.issn.1006-7086.2012.02.007

SEVERAL HOT CATHODE IONIZATION VACUUM GAUGE CALIBRATION AND ANALYSIS OF ELECTRICAL PARAMETERS

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This article through the vacuum comparison standard device and electric parameter measuring system,on some kinds of hot cathode ionization vacuum gauge calibration of electrical parameters.Based on the analysis of experimental data,the validation of the set of device and the feasibility of the method

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SEVERAL HOT CATHODE IONIZATION VACUUM GAUGE CALIBRATION AND ANALYSIS OF ELECTRICAL PARAMETERS

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