GUAN Ya-lan, CUI Xiu-qing, DIAO Xun-gang, et al. IMPROVEMENT IN COOLING SYSTEM OF TX1800 MAGNETRON FILM PLATING MACHINE[J]. VACUUM AND CRYOGENICS, 2012, 18(3): 142-145. DOI: 10.3969/j.issn.1006-7086.2012.03.003
Citation:
GUAN Ya-lan, CUI Xiu-qing, DIAO Xun-gang, et al. IMPROVEMENT IN COOLING SYSTEM OF TX1800 MAGNETRON FILM PLATING MACHINE[J]. VACUUM AND CRYOGENICS, 2012, 18(3): 142-145. DOI: 10.3969/j.issn.1006-7086.2012.03.003
GUAN Ya-lan, CUI Xiu-qing, DIAO Xun-gang, et al. IMPROVEMENT IN COOLING SYSTEM OF TX1800 MAGNETRON FILM PLATING MACHINE[J]. VACUUM AND CRYOGENICS, 2012, 18(3): 142-145. DOI: 10.3969/j.issn.1006-7086.2012.03.003
Citation:
GUAN Ya-lan, CUI Xiu-qing, DIAO Xun-gang, et al. IMPROVEMENT IN COOLING SYSTEM OF TX1800 MAGNETRON FILM PLATING MACHINE[J]. VACUUM AND CRYOGENICS, 2012, 18(3): 142-145. DOI: 10.3969/j.issn.1006-7086.2012.03.003
IMPROVEMENT IN COOLING SYSTEM OF TX1800 MAGNETRON FILM PLATING MACHINE
In this paper,structure of the target and corresponding cooling-system,based on Beijing Tian Rui Xing company’s TX1800 magnetron sputtering film plating machine,are analyzed briefly.Then the conception of platelet ＆transpiration cooling which is used extensively in field of a-erospace is introduced briefly,on this basis,the cooling-system is redesigned,proposing a new improvement thought.
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