CHARACTERISTIC OF PIEZOELECTRIC CERAMIC VALVE IN THE APPLICATION OF GAS FLOW CONTROL

PEV-1 type piezoelectric ceramic valve is used as the output drive element of Ar in the system of vacuum magnetron sputtering.The influence of piezoelectric ceramic characteristic on gas flow control is discussed.Especially the dependence of Ar output flow on the polarization voltage and environment temperature.During the process of polarization voltage increasing first and decreasing then,the Ar output flow curve showed hysteresis.At the same time,the hysteresis curve is distinct with the changing of environmental temperature.The lower temperature,the more obvious hysteresis effect is.