DESIGN OF MINIATURE CAPACITANCE DIAPHRAGM VACUUM GAUGE

Commercial capacitance diaphragm vacuum gauge cannot be satisfied of the requirement for vacuum measurement in deep space exploration;the miniature capacitance diaphragm gauge has been designed.To prevent the heat deflection of the gauge brought by the temperature variation in measurement process,the inverted T-shaped electrode plate and the construction for preventing the heat deflection have been used.To eliminate the stray capacitance and the deflection of measurement signal brought by temperature variation in the measurement process,the dual electrode construction has been used.The size of miniature capacitance diaphragm vacuum gauge is Φ42 mm×24 mm.Its weight is less than 200 g.The measurement of the minimum is 10^-2 Pa.The combined standard uncertainty is less than 5%.The miniature capacitance diaphragm gauge has the wide operating temperature range and can satisfy of the requirement of deep space exploration.