INTRODUCE THE DEVELOPMENT OF THE CALIBRATION TECHNOLOGY FOR MASS SPECTROMETER

As the residual gas analyzer and the partial pressure measurer,the mass spectrometer has been paid more and more attention,so its calibration technique is becoming a hot issue in the field of vacuum measurement.This article from the initial four types of mass spectrometer calibration method recommended by American vacuum society begin to discuss the calibration technique to other major laboratories′ which includes NIST,PTB,IGMC,AIST,Tsinghua university and Lanzhou Institute of Physics.Finally,it will analyze the advantages and disadvantages of these laboratories’ mass spectrometer calibration systems,which is providing a reference for domestic and foreign counterparts.