ONLINE CALIBRATION VACUUM GAUGE COMPARISON METHOD TECHNOLOGY REAEARCH

This paper introduces a kind of B-A type Pirani vacuum gauge as a vice vacuum gauge calibration work,online comparsion method with vacuum gauge calibration.The author through a standard vacuum gauge to work with,measure the same vacuum environment at the same time,data computing and analysis,gives the correction factor and its measurement uncertainty.In orderr to verify the ceracity and reliabilily of the prospective technology dissemnation,through the vice standard vacuum gauge performance test and online compare calibration.Think the technology can be solved in the filed of scientific resesrch and production of vacuum gauge calibration online.