THE TEMPERATURE INFLUENCE OF CAPACITANCE DIAPHRAGM GAUGE MEASURING ACCURACY

The experiment was performed on the static expansion vacuum standard by using a 1 333 Pa full-scale ACDG on this two circumstances: first,turn on the gauge heat and temperature compensation function of control module. Second,turn off. And also zero drift was recorded during the experiment. Finally,on the first circumstance,we founded that the measuring accuracy is quite well. And on the second circumstance,the measuring accuracy is also quite well at 10^-210^-1Pa,and it has deviation at 1~10²Pa and maximum is 36%.