YANG Shuo, MAN Wei-dong, ZHAO Yan-jun, et al. PROGRESS AND APPLICATIONS OF SINGLE CRYSTAL DIAMOND SYNTHESIZED BY MPCVD[J]. VACUUM AND CRYOGENICS, 2015, 21(3): 131-138. DOI: 10.3969/j.issn.1006-7086.2015.03.002
Citation: YANG Shuo, MAN Wei-dong, ZHAO Yan-jun, et al. PROGRESS AND APPLICATIONS OF SINGLE CRYSTAL DIAMOND SYNTHESIZED BY MPCVD[J]. VACUUM AND CRYOGENICS, 2015, 21(3): 131-138. DOI: 10.3969/j.issn.1006-7086.2015.03.002

PROGRESS AND APPLICATIONS OF SINGLE CRYSTAL DIAMOND SYNTHESIZED BY MPCVD

  • Single crystal diamond is one of the most potential materials in the high-tech fields due to its superior physical and chemical properties. Firstly,the growth technologies of CVD single crystal diamond are generally explained, Then a particular discussion was made on the process of MPCVD single crystal diamond such as the substrate selection, pretreatment and deposition parameters. Finally the ultra-precision cutting tools, optical field, particle detectors, high temperature semiconductor and electronic devices have been introduced, the prospects of single crystal diamond were also proposed.
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