RESEARCH PROGRESS IN THE GROWTH OF DIAMOND WITH HIGH RATE BY HFCVD

CVD diamond has some excellent properties,which approach or even exceed the nature diamond,such as the high mechanical strength,high thermal conductivity,low friction coefficient and so on. Such performances make the study of CVD diamond attracted so many researchers' persistent pursuit. This article is based on the hot filament chemical vapor deposition,elaborated some improvements in traditional HFCVD and their corresponding results in recent years,explained the meaning of these improvements to promote the industrialization of CVD diamond and made a expectation for the development in the future on this side.