THE DEFLATED RESEARCH ON VITON O-RING BASED ON USING QUADRUPOLE MASS SPECTROMETER

In the vacuum system,there are two important ways to seal the interface which are metal seal and rubber seal. The rubber seal belongs to self-tight seal,which is a kind of adaptable seals. So the rubber seal is used widely under the high vacuum. This paper discusses the deflated characteristics of Viton O-ring impact on analysis of trace impurity gases by using quadrupole mass spectrometer with closed ion source system. It is found that the Viton O-ring releases large amounts of oxygen. It's not suitable for using the rubber O-ring as seal device in the trace of impurity analysis system.