PROGRESS AND APPLICATIONS OF NANOCRYSTALLINE DIAMOND FILM BY MPCVD

HE Shuo; WANG Jian-hua; WENG Jun; LIU Fan

doi:10.3969/j.issn.1006-7086.2016.05.002

HE Shuo, WANG Jian-hua, WENG Jun, et al. PROGRESS AND APPLICATIONS OF NANOCRYSTALLINE DIAMOND FILM BY MPCVD[J]. VACUUM AND CRYOGENICS, 2016, 22(5): 254-259. DOI: 10.3969/j.issn.1006-7086.2016.05.002

Citation:

HE Shuo, WANG Jian-hua, WENG Jun, et al. PROGRESS AND APPLICATIONS OF NANOCRYSTALLINE DIAMOND FILM BY MPCVD[J]. VACUUM AND CRYOGENICS, 2016, 22(5): 254-259. DOI: 10.3969/j.issn.1006-7086.2016.05.002

Citation:

HE Shuo, WANG Jian-hua, WENG Jun, et al. PROGRESS AND APPLICATIONS OF NANOCRYSTALLINE DIAMOND FILM BY MPCVD[J]. VACUUM AND CRYOGENICS, 2016, 22(5): 254-259. DOI: 10.3969/j.issn.1006-7086.2016.05.002

PROGRESS AND APPLICATIONS OF NANOCRYSTALLINE DIAMOND FILM BY MPCVD

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This paper is mainly about the different gas source and related process parameters(like temperature,power,etc.) of MPCVD preparing nano-diamond,and gives a brief description of results of some scholars' researches.Then,this paper summarizes the applications of MPCVD nano-diamond in various windows,wide band gap semiconductor power devices and biomedical applications.Finally,we prospect the future development of nano-diamond.

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PROGRESS AND APPLICATIONS OF NANOCRYSTALLINE DIAMOND FILM BY MPCVD

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