RESEARCH STATUS AND DEVELOPMENT OF ZrVFe GETTER

ZrVFe getter material is a kind of NEG（Non-Evaporable Getter），which has selective pumping functions. According to the research and summarization of the research progress through ZrVFe getter in recent years，this paper basing on the preparation method，activation，sorption characteristic of ZrVFe getter，summarized the new progresses and new directions of ZrVFe getter and two common test methods of gas sorption characteristic，made some prospects of the application of ZrVFe getter.This paper compared the advantages and disadvantages of ZrVFe obtained by four kinds of preparation methods，introduced the calculation formula of gas sorption rate or sorption capacity by constant pressure method and constant volume method.In the end of the article，it was deemed there are some further research directions such as the sorption characteristic of ZrVFe getter at lower temperature，the activation conditions and characteristic of electroless nickel of ZrVFe getter and the simplification and low cost of ZrVFe getter films.