RESEARCH OF MEMS-TYPE CAPACITANCE DIAPHRAGM VACUUM GAUGE

Nowadays，traditional capacitance diaphragm vacuum gauge cannot meet the requirements for vacuum measurement in deep space exploration，near space exploration，strategic weapon，and combat medicine and so on，due to its volume and weight.The capacitance diaphragm vacuum gauge based on MEMS technology has been designed.The sensors and signal processing and controlling circuits can be made into microminiaturization.It has the advantages of volume，weight，power，integration compared with the traditional vacuum gauges.The study on MEMS-type capacitance diaphragm vacuum gauge has become the hot spot in this area.It can meet the requirements for vacuum measurement in the special areas.In the paper，the research status，technical characteristics and prospects of MEMS-type capacitance diaphragm vacuum gauge are described.