Design and Analysis of a New Type MEMS Capacitance Vacuum Pressure Sensor

In order to stretch measurement range and enhance the anti-overload capacity of MEMS capacitive vacuum sensor,a new island-like bottom electrode has been designed.Using finite element analysis (FEA) method to compare the relationship between pressure and deflection,pressure and capacitance,pressure and maximum stress,respectively.This new-type electrode has superb sensitivity in low pressure,better linearity and stronger anti-overload than normal structure,which could donate some references for the following manufacture process of MEMS vacuum sensor.