Research Progress of Cold Atom Quantum-based Vacuum Metrology

Ultra-high vacuum and extreme-high vacuum(UHV/XHV) measurements have a wide range of applications in aerospace science,semiconductor manufacturing,surface science and so on.With the development of cold atom technology,cold atom quantum-based vacuum metrology(CAVM) based on cold atom loss rate has great potential to become a new metrology technology.In this method,the measurement of cold atom loss rate depends only on collision cross section between cold atoms and gases.The CAVM will be an absolute vacuum sensor.In this paper,the basic concepts of laser cooling and trapped atom are briefly described,and the structure and working principle of magneto-optical trap are introduced.Furthermore,the research development of CAVM is investigated.The advantages and key technologies of this technique are analyzed and summarized.Finally,the developing trend of CAVM is prospected.With the miniaturization,commercialization and popularization of cold atom devices,CAVM is expected to be applied to the fields of high-performance,lightweight and miniaturized devices such as spacecraft.