Research Progress on Calibration Technology of Partial Pressure Mass Spectrometer

In a low-pressure environment,the measurement results of the total pressure vacuum gauge usually vary greatly with the change of the measured gas composition.In a high-vacuum environment containing a mixed gas,the total pressure gauge cannot accurately complete the pressure measurement mission.Therefore,the detection of gas components and the measurement of partial pressure are required.As the main tool for gas component detection and partial pressure measurement,mass spectrometers are widely used in various production and scientific research tasks.To ensure the accuracy of the mass spectrometer's quantitative detection,the mass spectrometer needs to be calibrated.In this paper,the calibration method of ion mass spectrometer is summarized in principle,and some calibration devices used by domestic and international metrology institutions are introduced.Finally,we introduce the current development of optical and quantum correlation methods for partial pressure,proposes the problems of current mass spectrometer calibration,and proposes the future development direction of mass spectrometer calibration for these problems.