Calibration Device and Method of Electrical Parameters of a Hot Cathode Ionization Vacuum Gauge Based on the Electrical Circuit Analogy Method

In the traditional electrical parameters calibration method of hot cathode ionization vacuum gauge controller,the vacuum gauges and the controllers must be connected and provided with a high vacuum environment,and the calibration cycle is long.To solve these problems,an equivalent simulation method of hot cathode ionization vacuum gauge controller is proposed,and a new calibration device for controller of hot cathode ionization vacuum gauge electrical parameters is developed.The device is used to calibrate the electrical parameters of the hot cathode ionization vacuum gauge controller,such as cathode voltage,grid voltage and emission current without vacuum gauge.The device is suitable for calibration with no matching vacuum gauge and on-site calibration.The problems of traditional electrical parameters calibration device for hot cathode ionization vacuum gauge controller are solved,and the device provides a new idea for developing other vacuum instruments using hot cathode ionization sources.