A Review of the Developing History and Trend of Chinese Vacuum Metrology Subject in the Past 15 Years (2004-2019)

This report reviews the developing history and trend of chinese vacuum metrology subject in the past 15 years. It analyzes the evolution of the chinese vacuum metrology system from below aspects, including measurement and calibration of total pressure, partial pressure, gas micro-flow (leak rate), pressure leak calibration, material outgassing rate measurement etc. Vacuum metrology is developing towards measurement of extreme values, under extreme environment conditions, and dynamic values. Currently, through interdisciplinary cutting-edge researches, new methods and conceptions for vacuum measurement have being further developed. Because of the redefinition of the SI units, quantum vacuum metrology technique has become the focus and inevitable trend.