Review on the Research Progress of Vacuum Leak with Micro-nano Channels

Traditional vacuum leaks are featured with problems that are difficult to make feature dimension controllable and limited range of molecular flow. Using the micro-nano channels as gas transmission paths can solve the above problems effectively. It introduces a method to manufacture one-dimensional/two-dimensional micro-nano channels by using optical exposure and etching process to make the channels on silicon substrates, combined with bonding technique to seal. Through metal encapsulation, glass frit bonding and capillary connection packaging, the sealing connection between silicon-based micro-nano channel vacuum leak and metal vacuum flange is realized. Such leaks are expected to be applied in vacuum metering, very small flow control and leak rate testing.