Advances in Cathode Arc Ion Plating Technology

WANG Fuzhen. Advances in Cathode Arc Ion Plating Technology[J]. VACUUM AND CRYOGENICS, 2020, 26(2): 87-95. DOI: 10.3969/j.issn.1006-7086.2020.02.001

Citation:

WANG Fuzhen. Advances in Cathode Arc Ion Plating Technology[J]. VACUUM AND CRYOGENICS, 2020, 26(2): 87-95. DOI: 10.3969/j.issn.1006-7086.2020.02.001

Citation:

WANG Fuzhen. Advances in Cathode Arc Ion Plating Technology[J]. VACUUM AND CRYOGENICS, 2020, 26(2): 87-95. DOI: 10.3969/j.issn.1006-7086.2020.02.001

Abstract

The technology of cathode arc ion plating is the main technology of hard coating for deposition tools.With the development of high-tech products and high-end manufacturing industry,cathode arc ion plating technology has been developed.The principle,characteristics and technical progress of various new cathode arc ion plating technologies are introduced.And the future development is prospected.

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