Fabrication Technology Development and Experimental Research of Microminiature Refrigerator

Microminiature refrigerator(MMR)is fabricated by novel micromachining technology.It is smaller than any other refrigerators,with a minimum size of 15 mm×2 mm×0.5 mm.The MMR has been wildly used to cool down micro elements with small refrigerating capacity requirement.This article mainly reports the development of fabrication technology of MMR,analyzes different methods of material choosing,channel etching,MMR sealing and connecting of gas way and circuit.Advantages and disadvantages of those methods are compared and investigated.MMR test samples were designed,fabricated and tested,7.2 MPa working pressure and 32.6 K temperature drop were achieved.Advices about technology improvement and future adhibition of MMR are proposed.