Practical Research on the Integrated Automatic Measurement of MEMS Vacuum Pump Pumping Performance

MEMS Vacuum Pump(MVP)is characterized by miniaturization,portability,low power consumption,low price and easy integration,which has a wide application prospect.Based on the current situation of the performance test methods and the lack of the system of the MVP,aiming at the problem that the limit vacuum of the MVP and the micro container to be tested is difficult to measure,the static expansion method and the balance weighing method are proposed to test the limit pressure and the pumping speed.The system characteristics under different pumping speed and different volume test hoods are studied by experiments.The results show that the time to reach the limit vacuum in the test process is about 20~40 s,and the difference between the sizes of test hoods is controlled within 10 times,so the test is fast and accurate.This research is helpful to promote the development of vacuum pump towards miniaturization,low power consumption,integration and portability.