Study on Magnetron Sputtering Technology of Vanadium Dioxide Thin Film for Smart Energy Efficient Window

Vanadium dioxide is a novel material with reversible metal-insulator phase transition near 68 ℃,which has the characteristics of high transmittance or high reflection in infrared range before and after phase transition,respectively.It is an ideal material for smart energy-efficient window.In view of the main problems existing in the magnetron sputtering of vanadium dioxide thin films for smart window applications.New technologies used in this field in recent years are summarized this paper,especially for the works progress in our group,such as applying bias voltage on the substrate to reduce deposition temperature,ion post-treatment to improve the visible transmittance,ultra-thin layer doping to reduce the phase transition temperature,etc.