Rapid Preparation of Super Thick Diamond-like Carbon Films by PECVD

The applications in the automotive engine,pipeline anticorrosive,aerospace fields require the thickness of diamond-like carbon(DLC)films up to 10~50 μm,and the thicker DLC films possess the better wear resistance and anticorrosive properties.However,the internal stress increases with the increase of DLC films thickness,which greatly increases the deposition difficulty.Plasmaenhanced chemical vapor deposition(PECVD)is one of the main methods to deposit DLC films,which possesses many advantages,such asthe fast deposition rate,the low deposition temperature and thick film deposition,and the deposition of DLC films on the surface of workpiece with complex shapes.In this paper,super thick DLC films,alterative compressive stress(Si_x-DLC)and tensile stress(Si_y-DLC),were deposited rapidly on the surface of plane workpiece,piston ring functional surface and pipes inner surface by PECVD technology.The results show that the thickness of DLC films on the surface of M2 high speed steel and the functional surfaces of piston ring are over 30 μm,and show the excellent wear resistance and low friction coefficient.In addition,the film thickness of DLC deposited on the inner wall of the metal pipes is more than 10 μm,showing excellent corrosion resistance and tribological properties.Therefore,PECVD can be used to deposit quickly super thick DLC films on work piece of different shapes,which can be used to improve the wear resistance and corrosion resistance of the workpiece.