Research Progress of Vacuum Metrology Standard Based on Fabry-Perot Interference Cavities

With the quantized definition of the international unit system,the technology of vacuum gauge based on optical methods has become hotspots in this research filed.The measurement methods based on Fabry-Perot resonant cavities is one of most representive in these.The principle of it was show in this article and we introduced the research progress of NIST,Umeå and AIST briefly.Our research group construct a vacuum gauge device based on F-P interference cavities.The composition of it,fineness of interference cavities,stability of temperature in cavities and laser frequency was introduced in this essay.We can conclude that this methods has high sensitivity and reliability.And it could effectively promote the quantum transform of vacuum measurement in our nation and has capacious application prospect.