Discharge Simulation and Pumping Characteristics of Micro Sputtering Ion Pump

In order to understand the relationship between the internal discharge and the pumping velocity in the sputtering ion pump,the ionization,excitation and elastic collision of nitrogen molecules,and the gas discharge in the miniature sputtering ion pump was numerically simulated by using COMSOL software.The distribution of electron density,temperature,particle trajectory,and incident angle and incident energy were obtained,and analyze the influence of these factors on the pumping speed.The pumping speed of the micro sputtering ion pump was measured on the experimental platform,and the curves of the pumping speed with the pressure under different working voltage were obtained,and compared with the theoretical pumping speed.The simulation results and experimental data were in good agreement with the theoretical pumping speed.It has reference value for the design and improvement of sputtering ion pump.