Research of the Miniature Gas Analyzer Based on the Time-of-flight Mass Spectrometer

The research progress and design ideas of self-developed miniature gas analyzer are introduced.The analyzer will be used in deep space exploration.Its main unit is time-of-flight mass spectrometer.The inlet systems and pumping systems are equipped.It uses some advanced technologies which include the field emission ion source and the ion mirror.It has some advantages which include the light weight (< 9 kg),the low power (< 20 W),the wide mass testing range (amu=1~1 000),the high mass testing resolution (> 400),the quick response speed,the short mass scan cycle time (30 μs)and the high testing concentration sensitivity.This analyzer can be worked on high vacuum or low vacuum environment.This mass spectrometer's weight is less than 2.5 kg,the power consumption is less than 5 W.