Study on Preparation and Characterization of TiN/H-DLC Films

In order to explore the mechanical properties and corrosion resistance of DLC composite film prepared by Duplex deposition technology.TiN/H-DLC film was deposited on 316L stainless steel substrate by multi-arc ion plating(MAIP)and unbalanced magnetron sputtering(UBMS).The morphology and microstructure of the films were characterized by three-dimensional profiler,scanning electron microscope and Raman Spectroscopy.The hardness,adhesion,tribological properties and corrosion resistance of above film were characterized by nanoindenter,scratch tester,CSM tribometer and electrochemical workstation,respectively.Results show that the introduction of the TiN layer improved the adhesion between film and substrate,and reduced the friction coefficient of TiN/H-DLC composite film.But it did not effectively reduce the wear rate,which may be due to the fact that the roughness is the main factor affecting wear rate in the case of close hardness and friction coefficient.In addition,the H-DLC surface is relatively dense,thus obtaining the best corrosion resistance in 3.5% NaCl.Therefore,the use of duplex deposition technology can enhance the mechanical proper-ties of H-DLC film.