The Rotor’s Effects for the Metrological Characteristics of Spinning Rotor Gauge

Spinning Rotor Vacuum Gauge is a precise viscous vacuum gauge.Its core component is a metal ball(rotor)suspended in a vacuum and rotating freely.By comparing the rotors with different diameter variations,spherical error,surface roughness and materials,the interrelationship between the rotors and the stability of vaccum gauge well as gas types and the reasons were investigated.The experimental results show that the GCr15 high carbon chromium steel rotor with a diameter variation of 0.13 μm,spherical error of 0.13 μm,the roughness of 0.014 μm,and a diameter of 4.5 mm has first-class zero-point stability and less measurement uncertainty.