New Technology of Vacuum Total Pressure Measurement

Vacuum measurement technology is an important part of vacuum science and technology.It has important applications in aerospace,semiconductor,nuclear industry,accelerator,new materials and other fields.After several centuries of developments,from macro mechanics effect to quantum effect,the principle of vacuum measurement is constantly innovated and developed.From atmospheric pressure to extremely high vacuum(XHV),different vacuum measuring instruments cover the various measuring ranges.In the paper,the evolution history of vacuum measurement principle is reviewed systematically.According to the demand of the high-end vacuum equipment for vacuum total pressure measurement in recent years,the remarkable trend of vacuum measurement instruments development towards high precision,miniaturization and intelligence is clarified.The latest development status of vacuum total pressure measurement technology and instruments for nearly a decade is summarized,and the future development of new vacuum total pressure measurement technology is prospected as well.