MEMS Capacitance Diaphragm Gauge and Performance

A novel capacitance diaphragm gauge was developed based on the Micro-Electro-Mechanical-System(MEMS)technology.Combined with the measuring circuit,the overall performance of the gauge was investigated.The results show that the MEMS capacitance diaphragm gauge has good stability in the measurement range of 0.2~1 050 Pa,the resolution and the accuracy of the gauge are 0.1 Pa and 0.1%FS,respectively.Moreover,the weight,volume and power consumption of the packaged MEMS capacitance diaphragm gauge are 5.0 g,4.1 cm³and around 2 W,respectively.Compared to the conventional capacitance diaphragm gauge,the MEMS capacitance diaphragm gauge developed in this paper has more attractive characteristics such as miniaturization,low power consumption and low-cost,which give it huge advantage in space applications and industrial areas.