Development and Performance Study of MEMS Resonant Gauge for High Vacuum Measurement

This paper introduces a MEMS resonant vacuum sensor with double mass blocks for high vacuum gauge miniaturization.The gauge,integrated with ASIC circuit,uses the technical scheme of electrostatic drive and capacitance detection to invert the vacuum pressure into vibrating amplitudes variation.Measurement principle of the gauge is briefly introduced and the relationship between AC driving signal and output amplitude and frequency is studied.Measurement range of 10^-4~10^-1Pa has realized by using a appropriate AC signal,with a very high measurement resolution(better than 1×10^-6Pa).This gauge has a broad application prospect in the field of leak threshold alarm and leak monitoring of small vacuum cavity.