High-pressure Miniaturized Ionization Vacuum Sensor Based on SiO_x-based Tunneling Electron Source

Miniaturized ionization vacuum sensors have very important applications in pressure detection in tiny space and special scope.However,the previous miniaturized ionization vacuum sensors still have shortcomings such as large size,high working voltage or high energy consumption.A new-type of high-pressure miniaturized ionization vacuum sensor is fabricated by using a new-type of SiO_x-based tunneling electron source as the cathode,which is compact in structure,easy in fabrication and miniature in size,only 15 mm×15 mm×2 mm(length×width×height),also has the advantages of low operating voltage,wide detection range,and high detection pressure upper limit.The experimental results show that it has a good linear response in the pressure range of 3.50×10^-2~1.02×10²Pa.The research provides a feasible solution to the problem that the traditional ionization vacuum sensor and Pirani vacuum sensor are not accurate in the pressure ranges and is expected to promote the widespread applications of ionization vacuum sensors in more important fields.