Study on Correction Method of Measurement Error of Capacitive Diaphragm Gauge

Capacitive diaphragm gauge(CDG)is an instrument which can measure the vacuum indirectly by means of variable-pitch parallel plate capacitor.The uncorrected CDG has a large measurement error.The relation between the measurement error and the calibration curve was investigated by conducting calibration experiments on CDGs.A method to correct the measurement error was presented and compared with the traditional calibration factor method.The results show that the correction effect of this method is better than that of single correction factor method,and can play a corrective role in the full range.The research results lay the technical foundation for improving the measurement accuracy of CDG.