Study on Capillary Vacuum Leak and its Metrological Characteristics
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ZHAO Lan,
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CHENG Yongjun,
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SUN Wenjun,
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ZENG Xiang,
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WENG jun,
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DONG Meng,
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CHEN Lian,
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GUAN Baoguo,
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ZHANG Ruifang,
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CHEN Huiying,
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SUN Donghua,
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DING Dong,
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FENG Tianyou,
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LI Ming,
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ZHANG Xu
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Abstract
The capillary vacuum leak was developed,and its structural composition was described in detail.The temperature characteristics,annual decay rate,repeatability and stability of the leak were studied experimentally.The results show that the temperature coefficient of the leak is less than 1.0%,the annual decay rate is smaller than 1.0%,the repeatability is less than 0.3%,and the stability is less than 1.0% in 12 hours by using helium mass spectrometer leak detector.The developed capillary leak is widely used in vacuum leak detection.
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