WANG Zhi-jun, HU Li-zhong, WANG Zhao-yang, et al. GROWTH METHODS AND INFLEUNCE OF CONDITIONS ON PROPERTIES OF MgO THIN FILMS[J]. VACUUM AND CRYOGENICS, 2006, 12(1): 41-45.
Citation: WANG Zhi-jun, HU Li-zhong, WANG Zhao-yang, et al. GROWTH METHODS AND INFLEUNCE OF CONDITIONS ON PROPERTIES OF MgO THIN FILMS[J]. VACUUM AND CRYOGENICS, 2006, 12(1): 41-45.

GROWTH METHODS AND INFLEUNCE OF CONDITIONS ON PROPERTIES OF MgO THIN FILMS

  • The main methods of preparing MgO thin films,including Electron-beam evaporation,PLD,Magn-etron sputtering,MOCVD,MBE and Sol-gel were reviewed.The advantages and shortcomings of these methods in MgO film preparation are represented.The effects of different growth conditions on crystalline orientations and surf-ace morphology of MgO thin film are discussed.
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