GROWTH METHODS AND INFLEUNCE OF CONDITIONS ON PROPERTIES OF MgO THIN FILMS
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Graphical Abstract
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Abstract
The main methods of preparing MgO thin films,including Electron-beam evaporation,PLD,Magn-etron sputtering,MOCVD,MBE and Sol-gel were reviewed.The advantages and shortcomings of these methods in MgO film preparation are represented.The effects of different growth conditions on crystalline orientations and surf-ace morphology of MgO thin film are discussed.
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