EXPERIMENTAL TESTS ON CALIBRATION APPARATUS OF DYNAMIC FLOW METHOD

Calibration principle and method of dynamic flow method vacuum calibration apparatus is introduced. Performance of the calibration apparatus is also studied in detail. The experiments for calibrating spinning rotor gauge and extractor gauge are accomplished. The result of experiment shows that calibration range of dynamic flow method vacuum calibration apparatus is from 2.6 10^-7 Pa to 2.4 10^-1 Pa with uncertainty is less than 1.4%.The spinning rotor gauge is calibrated by LIP（Lanzhou institute of physics）and PTB respectively. The difference of result is less than 1.6%.