LIANG Kai-ji, ZHANG Yuan-qing, CAI Dong-feng, et al. HELIUM SPECTRUM LEAK DETECTING TECHNOLOGY FOR LARGE CHAMBER WITH COMPLEX CONSTRUCTION[J]. VACUUM AND CRYOGENICS, 2000, 6(2): 108-110.
Citation: LIANG Kai-ji, ZHANG Yuan-qing, CAI Dong-feng, et al. HELIUM SPECTRUM LEAK DETECTING TECHNOLOGY FOR LARGE CHAMBER WITH COMPLEX CONSTRUCTION[J]. VACUUM AND CRYOGENICS, 2000, 6(2): 108-110.

HELIUM SPECTRUM LEAK DETECTING TECHNOLOGY FOR LARGE CHAMBER WITH COMPLEX CONSTRUCTION

  • The helium mass spectrometer leak detecting technology for a large vacuum chamber with the complex construction is described.Some problems in operation are shown and analyzed.And solving methods are given to install suitable detecting systems and decelerate the detecting move and detect complex parts carefully.
  • loading

Catalog

    Turn off MathJax
    Article Contents

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return