ACCURATE CALIBRATION TECHNIQUE OF ULTRAHIGH VACUUM

Li Detian, Li Zhenghai, Feng Yan. ACCURATE CALIBRATION TECHNIQUE OF ULTRAHIGH VACUUM[J]. VACUUM AND CRYOGENICS, 2000, 6(1): 26-29.

Citation:

Li Detian, Li Zhenghai, Feng Yan. ACCURATE CALIBRATION TECHNIQUE OF ULTRAHIGH VACUUM[J]. VACUUM AND CRYOGENICS, 2000, 6(1): 26-29.

Citation:

Li Detian, Li Zhenghai, Feng Yan. ACCURATE CALIBRATION TECHNIQUE OF ULTRAHIGH VACUUM[J]. VACUUM AND CRYOGENICS, 2000, 6(1): 26-29.

Abstract

An accurate calibration technique of ultrahigh vacuum was introduced,which based on spinning rotor gauge,so it has the advantages of simplicity,practicality and small uncertainty.In addition,the experimental results of calibrating extraction gauges with this techmique were presented.

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