STUDY ON TRANSFER COEFFICIENT OF SPINNING ROTOR GAUGE

The spinning rotor gauge is an excellent viscosity vacuum gauge.It is widely used as reference standard in calibration services.Its key component is a freely spinning metal sphere（rotor）,which is suspended in vacuum.The long-term stability of spinning rotor gauge,the dependences of transfer coefficient on gases and temperatures were investigated by experiments.The conclusions have reference value for the uncertainty evaluation of vacuum standards which use spinning rotor gauges as reference standards.