ZHANG Dixin, LU Shiliang, MA Shilong, et al. PERFORMANCE TEXTS OF DYNAMIC FLOW METHOD UHV STANDARD APPARATUS[J]. VACUUM AND CRYOGENICS, 1998, 4(4): 210-216.
Citation:
ZHANG Dixin, LU Shiliang, MA Shilong, et al. PERFORMANCE TEXTS OF DYNAMIC FLOW METHOD UHV STANDARD APPARATUS[J]. VACUUM AND CRYOGENICS, 1998, 4(4): 210-216.
ZHANG Dixin, LU Shiliang, MA Shilong, et al. PERFORMANCE TEXTS OF DYNAMIC FLOW METHOD UHV STANDARD APPARATUS[J]. VACUUM AND CRYOGENICS, 1998, 4(4): 210-216.
Citation:
ZHANG Dixin, LU Shiliang, MA Shilong, et al. PERFORMANCE TEXTS OF DYNAMIC FLOW METHOD UHV STANDARD APPARATUS[J]. VACUUM AND CRYOGENICS, 1998, 4(4): 210-216.
PERFORMANCE TEXTS OF DYNAMIC FLOW METHOD UHV STANDARD APPARATUS
The dynamic flow method UHV standard apparatus is an absolute vacuum standard for vacuum gauge calibration.It is composed of a calibration system,a gas flowmeter and pumping system.The the ultimate vacuum is 6.5×10 -9 Pa the calibration range is from 10 -2 to 10 -7 Pa and the uncertainty amounts to 3% from 10 -2 to 10 -6 Pa and increases to 10% in 10 -7 Pa.
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