STUDY OF PRESSURE RISE CHARACTERISTIC OF SEALED TITANIUM PUMP-STAINLESS STEEL UHV SYSTEM

Because of the adsorption of gas molecules to the vacuum wall,the pressure rise characteristic of sealed titanium pump-stainless steel UHV system is very different from that of general vacuum systems.The general method of calculating leak rate is no longer valid.In this article,the pressure rise characteristic of this type of vacuum systems was studied and the equation of calculating real leak rate was put forward.All of these are based on our experiments.