SUN Yabing, WANG Shouguo, YU Shiji. THEORETICAL CALCULATION OF AN ION PUMP’S PUMPING SPEED FOR N2 OR CO[J]. VACUUM AND CRYOGENICS, 1997, 3(2): 100-103.
Citation: SUN Yabing, WANG Shouguo, YU Shiji. THEORETICAL CALCULATION OF AN ION PUMP’S PUMPING SPEED FOR N2 OR CO[J]. VACUUM AND CRYOGENICS, 1997, 3(2): 100-103.

THEORETICAL CALCULATION OF AN ION PUMP’S PUMPING SPEED FOR N2 OR CO

  • According to the mechanism of the Penning discharge,deduce the theoretical formula of an ion pumps pumping speed,discuss the dependence of the pumping speed on several discharge parameters,and calculate the pumping speed for N 2 or CO.The calculating results agree well with exeperimental results and the empirical formulas.
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