THE EFFECT OF PRESSURE ON THE ARGON PLASMA CHARACTERIZATION

A new large area microwave plasma source has been developed. The source consists of slots on the inner side which acts as a field applicatior to sustain a plasma. The plasma is contained in a Pyrex glass cylinder with an inner diameter of 30 cm and a height of 50 cm. The source has been used to study the effect of pressure on argon plasma parameters and microwave power for plasma ignition and extinction.