THE ELECTRIC CIRCUIT OF ARC AVOIDANCE MAGNETRON SPUTTERING COATING

In order to avoid the effects of the arc on the magnetron sputtering coating industrized production during discharge of the triphase rectified dc power, three kinds of the triphase controlable silicon rectified arc circuit have been designed by the function of the electric circuit of arc avoidance and the methods of quickly judging arc, the damage caused by the recified arc has been efficiently inhibitted, the power of the megnetron sputtering increased, the uniformity of the coating layers improved and the finished products have become more.